Priority: constant volume, constant flow rate dispensing performance
Electric RT pump
Pump with new RT structure and tube diaphragm along with high response. Media: Photoresist, purified water, chemicals (Combustible matter not allowed.)
AC Servo Drive CT/PT/HT Pump
Electrical pump for liquid crystals, PDP, organic EL, and other applications where uniform thin film coating is required. Enables a highly reliable structure and advanced constant flow volume control.
